Nature

Sub-ångström resolution ptychography in a scanning electron microscope at 20 keV

Achieving sub-ångström (<1 Å) resolution in electron microscopy typically requires a high-energy (>30 keV) beam and a transmission electron microscope (TEM) fitted with an aberration corrector and a ...
Nature

Imaging low-dimensional nanostructures by very low voltage scanning electron microscopy: ultra-shallow topography and depth-tunable material contrast

We demonstrate the implications of very low voltage operation (<1 kV) of a scanning electron microscope for imaging low-dimensional nanostructures where standard voltages (2–5 kV) involve a beam ...